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Alexander Vinokhodov
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Year
EUV sources for lithography
V Bakshi
SPIE press, 2006
4172006
EUV sources using Xe and Sn discharge plasmas
VM Borisov, AV Eltsov, AS Ivanov, YB Kiryukhin, OB Khristoforov, ...
Journal of Physics D: Applied Physics 37 (23), 3254, 2004
942004
The study of silicon films obtained by sequential lateral solidification by means of a 3-kHz excimer laser with a sheetlike beam
AB Limanov, VA Chubarenko, VM Borisov, AY Vinokhodov, AI Demin, ...
Russian Microelectronics 28 (1), 25-33, 1999
521999
Expansion and fragmentation of a liquid-metal droplet by a short laser pulse
SY Grigoryev, BV Lakatosh, MS Krivokorytov, VV Zhakhovsky, ...
Physical Review Applied 10 (6), 064009, 2018
492018
Development of linear sequential lateral solidification technique to fabricate quasi-single-crystal super-thin si films for high-performance thin film transistor devices
AB Limanov, VM Borisov, AY Vinokhodov, AI Demin, AI El’tsov, ...
Perspectives, Science and Technologies for Novel Silicon on Insulator …, 2000
462000
Single-Axis Projection Scheme for Conducting Sequential Lateral Solidifica-tion of Si Films for Large-Area Electronics
A Limanov, V Borisov
MRS Online Proceedings Library (OPL) 685, D10. 1.1, 2001
452001
Fragmentation dynamics of liquid–metal droplets under ultra-short laser pulses
M M Basko, M S Krivokorytov, A Yu Vinokhodov, Yu V Sidelnikov, V M Krivtsun ...
Laser Phys. Lett 14 (036001), 2017
442017
Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation
VVM M. S. Krivokorytov,A. Yu. Vinokhodov,Yu. V. Sidelnikov,V. M. Krivtsun,V ...
PHYSICAL REVIEW E 95, 031101(R)-1-6, 2017
402017
Pumping rate of electric-discharge excimer lasers
VM Borisov, IE Bragin, AY Vinokhodov, VA Vodchits
Quantum Electronics 25 (6), 507, 1995
371995
Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source
A Vinokhodov, M Krivokorytov, Y Sidelnikov, V Krivtsun, V Medvedev, ...
Review of Scientific Instruments 87 (10), 2016
312016
Effects limiting the average power of compact pulse-periodic KrF lasers
VM Borisov, AV Borisov, IE Bragin, AY Vinokhodov
Quantum electronics 25 (5), 421, 1995
311995
High-power EUV sources for lithography: a comparison of laser-produced plasma and gas-discharge-produced plasma
U Stamm, I Ahmad, VM Borisov, F Flohrer, K Gaebel, S Götze, AS Ivanov, ...
Emerging Lithographic Technologies VI 4688, 122-133, 2002
302002
Formation of a fine-dispersed liquid-metal target under the action of femto-and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range
AY Vinokhodov, KN Koshelev, VN Krivtsun, MS Krivokorytov, ...
Quantum Electronics 46 (1), 23, 2016
292016
Compact Z-pinch EUV source for photolithography
G Schriever, M Rahe, U Stamm, D Basting, OB Khristoforov, ...
Emerging Lithographic Technologies V 4343, 615-620, 2001
282001
Shaping and controlled fragmentation of liquid metal droplets through cavitation
MS Krivokorytov, Q Zeng, BV Lakatosh, AY Vinokhodov, YV Sidelnikov, ...
Scientific reports 8 (1), 597, 2018
262018
Development of high-power EUV sources for lithography
VM Borisov, I Ahmad, S Goetze, AS Ivanov, OB Khristoforov, ...
Emerging Lithographic Technologies VI 4688, 626-633, 2002
262002
High power EUV sources based on gas discharge plasmas and laser produced plasmas
G Schriever, U Stamm, K Gäbel, M Darscht, V Borisov, O Khristoforov, ...
Microelectronic engineering 61, 83-88, 2002
222002
Increase in the repetition frequency of XeCl laser pulses to 1 kHz
VY Baranov, VM Borisov, AY Vinokhodov, FI Vysikaĭlo, YB Kiryukhin
Soviet Journal of Quantum Electronics 14 (4), 558, 1984
211984
Kilowatt-range high-repetition-rate excimer lasers
VM Borisov, OB Khristoforov, YB Kirykhin, SG Kuznetsov, YY Stepanov, ...
Excimer Lasers and Applications III 1503, 40-47, 1991
201991
Droplet-based, high-brightness extreme ultraviolet laser plasma source for metrology
AY Vinokhodov, MS Krivokorytov, YV Sidelnikov, VM Krivtsun, ...
Journal of Applied Physics 120 (16), 2016
182016
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