H.V. Jansen (Henri)
H.V. Jansen (Henri)
Associate Professor, Universiteit Twente
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Cited by
Cited by
Stiction in surface micromachining
N Tas, T Sonnenberg, H Jansen, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 6 (4), 385, 1996
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
H Jansen, M de Boer, R Legtenberg, M Elwenspoek
Journal of Micromechanics and Microengineering 5 (2), 115, 1995
A survey on the reactive ion etching of silicon in microtechnology
H Jansen, H Gardeniers, M de Boer, M Elwenspoek, J Fluitman
Journal of micromechanics and microengineering 6 (1), 14, 1996
Silicon micromachining
M Elwenspoek, M Elwenspoek, HV Jansen
Cambridge university press, 2004
Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as …
HV Jansen, MJ De Boer, S Unnikrishnan, MC Louwerse, MC Elwenspoek
Journal of micromechanics and microengineering 19 (3), 033001, 2009
Capillary filling speed of water in nanochannels
NR Tas, J Haneveld, HV Jansen, M Elwenspoek, A van den Berg
Applied Physics Letters 85 (15), 3274-3276, 2004
Micromachining of buried micro channels in silicon
MJ de Boer, RW Tjerkstra, JW Berenschot, HV Jansen, GJ Burger, ...
Journal of Microelectromechanical systems 9 (1), 94-103, 2000
Silicon nitride nanosieve membrane
HD Tong, HV Jansen, VJ Gadgil, CG Bostan, E Berenschot, CJM van Rijn, ...
Nano letters 4 (2), 283-287, 2004
Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures
MJ De Boer, JGE Gardeniers, HV Jansen, E Smulders, MJ Gilde, ...
Journal of microelectromechanical systems 11 (4), 385-401, 2002
The μ-flown: a novel device for measuring acoustic flows
HE de Bree, P Leussink, T Korthorst, H Jansen, TSJ Lammerink, ...
Sensors and actuators A: Physical 54 (1-3), 552-557, 1996
Anisotropic reactive ion etching of silicon using SF 6/O 2/CHF 3 gas mixtures
R Legtenberg, H Jansen, M de Boer, M Elwenspoek
Journal of the electrochemical society 142 (6), 2020, 1995
Method and system for fabrication of integrated tunable/switchable passive microwave and millimeter wave modules
H Tilmans, E Beyne, H Jansen, W De Raedt
US Patent 6,876,056, 2005
Ta2O5 as gate dielectric material for low-voltage organic thin-film transistors
C Bartic, H Jansen, A Campitelli, S Borghs
Organic electronics 3 (2), 65-72, 2002
BSM 7: RIE lag in high aspect ratio trench etching of silicon
H Jansen, M de Boer, R Wiegerink, N Tas, E Smulders, C Neagu, ...
Microelectronic Engineering 35 (1-4), 45-50, 1997
Capillary filling of sub-10nm nanochannels
J Haneveld, NR Tas, N Brunets, HV Jansen, M Elwenspoek
Journal of applied physics 104 (1), 2008
The black silicon method II: The effect of mask material and loading on the reactive ion etching of deep silicon trenches
H Jansen, M de Boer, J Burger, R Legtenberg, M Elwenspoek
Microelectronic engineering 27 (1-4), 475-480, 1995
Characterization of a planar microcoil for implantable microsystems
CR Neagu, HV Jansen, A Smith, JGE Gardeniers, MC Elwenspoek
Sensors and Actuators A: Physical 62 (1-3), 599-611, 1997
High resolution powder blast micromachining
H Wensink, JW Berenschot, HV Jansen, MC Elwenspoek
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
A capacitive RF power sensor based on MEMS technology
LJ Fernandez, RJ Wiegerink, J Flokstra, J Sese, HV Jansen, ...
Journal of Micromechanics and Microengineering 16 (7), 1099, 2006
Wet anisotropic etching for fluidic 1D nanochannels
J Haneveld, H Jansen, E Berenschot, N Tas, M Elwenspoek
Journal of micromechanics and microengineering 13 (4), S62, 2003
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