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Byungki Jung
Byungki Jung
Verified email at cornell.edu
Title
Cited by
Cited by
Year
Transient laser heating induced hierarchical porous structures from block copolymer–directed self-assembly
KW Tan, B Jung, JG Werner, ER Rhoades, MO Thompson, U Wiesner
Science 349 (6243), 54-58, 2015
1662015
A light-emitting memristor
AA Zakhidov, B Jung, JD Slinker, HD Abruña, GG Malliaras
Organic Electronics 11 (1), 150-153, 2010
662010
Kinetic rates of thermal transformations and diffusion in polymer systems measured during sub-millisecond laser-induced heating
B Jung, J Sha, F Paredes, M Chandhok, TR Younkin, U Wiesner, CK Ober, ...
ACS nano 6 (7), 5830-5836, 2012
412012
Lateral temperature-gradient method for high-throughput characterization of material processing by millisecond laser annealing
RT Bell, AG Jacobs, VC Sorg, B Jung, MO Hill, BE Treml, MO Thompson
ACS Combinatorial Science 18 (9), 548-558, 2016
342016
Laser-induced sub-millisecond heating reveals distinct tertiary ester cleavage reaction pathways in a photolithographic resist polymer
B Jung, P Satish, DN Bunck, WR Dichtel, CK Ober, MO Thompson
ACS nano 8 (6), 5746-5756, 2014
302014
Experimental determination of thermal profiles during laser spike annealing with quantitative comparison to 3-dimensional simulations
K Iyengar, B Jung, M Willemann, P Clancy, MO Thompson
Applied Physics Letters 100 (21), 2012
272012
Control of PS-b-PMMA directed self-assembly registration by laser induced millisecond thermal annealing
AG Jacobs, B Jung, CK Ober, MO Thompson
Alternative Lithographic Technologies VI 9049, 492-498, 2014
222014
LWR reduction and flow of chemically amplified resist patterns during sub-millisecond heating
B Jung, CK Ober, MO Thompson, M Chandhok
Advances in Resist Materials and Processing Technology XXVIII 7972, 763-770, 2011
202011
Synthesis and formation mechanism of all-organic block copolymer-directed templating of laser-induced crystalline silicon nanostructures
KW Tan, JG Werner, MD Goodman, HS Kim, B Jung, H Sai, PV Braun, ...
ACS Applied Materials & Interfaces 10 (49), 42777-42785, 2018
162018
Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing
AG Jacobs, B Jung, J Jiang, CK Ober, MO Thompson
Journal of Micro/Nanolithography, MEMS, and MOEMS 14 (3), 031205-031205, 2015
142015
Stacked transistors with dielectric between source/drain materials of different strata
W Rachmady, CY Huang, E Mannebach, A Phan, CSC Barrett, JP Gupta, ...
US Patent App. 16/355,623, 2020
122020
Sub-millisecond post exposure bake of chemically amplified resists by CO2 laser heat treatment
B Jung, J Sha, F Paredes, CK Ober, MO Thompson, M Chandhok, ...
Advances in Resist Materials and Processing Technology XXVII 7639, 194-202, 2010
112010
Submillisecond post-exposure bake of chemically amplified resists by CO2 laser spike annealing
J Sha, B Jung, MO Thompson, CK Ober, M Chandhok, TR Younkin
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2009
112009
Controlled roughness reduction of patterned resist polymers using laser-induced sub-millisecond heating
B Jung, CK Ober, MO Thompson
Journal of Materials Chemistry C 2 (43), 9115-9121, 2014
92014
Time dependent behavior of chemically amplified resist characterized under sub-millisecond post exposure bake
B Jung, M Chandhok, TR Younkin, CK Ober, MO Thompson
Journal of Photopolymer Science and Technology 24 (5), 487-490, 2011
92011
Addressing challenges in lithography using sub-millisecond post exposure bake of chemically amplified resists
B Jung, CK Ober, MO Thompson, TR Younkin, M Chandhok
Advances in Resist Materials and Processing Technology XXVIII 7972, 382-387, 2011
72011
Investigation of acid diffusion during laser spike annealing with systematically designed photoacid generators
M Krysak, B Jung, MO Thompson, CK Ober
Advances in Resist Materials and Processing Technology XXIX 8325, 196-201, 2012
62012
Line edge roughness of high deprotection activation energy photoresist by using sub-millisecond post exposure bake
J Jiang, B Jung, MO Thompson, CK Ober
Advances in Resist Materials and Processing Technology XXX 8682, 443-449, 2013
52013
Chemical reaction and diffusion kinetics during laser-induced submillisecond heating for lithographic applications
J Jiang, B Jung, MO Thompson, CK Ober
Journal of Vacuum Science & Technology B 37 (4), 2019
42019
Laser-induced millisecond heating of polymers and small molecules for pattern development
B Jung
Cornell University, 2014
32014
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Articles 1–20