| Transient enhanced diffusion of arsenic in silicon S Solmi, M Ferri, M Bersani, D Giubertoni, V Soncini Journal of applied physics 94 (8), 4950-4955, 2003 | 96 | 2003 |
| Carbon-cap for ohmic contacts on ion-implanted 4H–SiC R Nipoti, F Mancarella, F Moscatelli, R Rizzoli, S Zampolli, M Ferri Electrochemical and Solid-State Letters 13 (12), H432, 2010 | 62 | 2010 |
| Arsenic uphill diffusion during shallow junction formation M Ferri, S Solmi, A Parisini, M Bersani, D Giubertoni, M Barozzi Journal of Applied Physics 99 (11), 2006 | 57 | 2006 |
| Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators L Belsito, M Ferri, F Mancarella, L Masini, J Yan, AA Seshia, K Soga, ... Sensors and Actuators A: Physical 239, 90-101, 2016 | 35 | 2016 |
| Thermoelectric materials in MEMS and NEMS: a review A Roncaglia, M Ferri Science of Advanced Materials 3 (3), 401-419, 2011 | 29 | 2011 |
| Miniaturized fiber-optic ultrasound probes for endoscopic tissue analysis by micro-opto-mechanical technology E Vannacci, L Belsito, F Mancarella, M Ferri, GP Veronese, A Roncaglia, ... Biomedical microdevices 16, 415-426, 2014 | 27 | 2014 |
| Fabrication of fiber-optic broadband ultrasound emitters by micro-opto-mechanical technology L Belsito, E Vannacci, F Mancarella, M Ferri, GP Veronese, E Biagi, ... Journal of Micromechanics and Microengineering 24 (8), 085003, 2014 | 25 | 2014 |
| Strain sensing on steel surfaces using vacuum packaged MEMS resonators M Ferri, F Mancarell, L Belsito, A Roncaglia, J Yan, AA Seshia, K Soga, ... Procedia Engineering 5, 1426-1429, 2010 | 22 | 2010 |
| High-resolution strain sensing on steel by silicon-on-insulator flexural resonators fabricated with chip-level vacuum packaging L Belsito, M Ferri, F Mancarella, A Roncaglia, J Yan, AA Seshia, K Soga 2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013 | 20 | 2013 |
| Ultradense silicon nanowire arrays produced via top-down planar technology M Ferri, F Suriano, A Roncaglia, S Solmi, GF Cerofolini, E Romano, ... Microelectronic engineering 88 (6), 877-881, 2011 | 19 | 2011 |
| Nanostrain resolution strain sensing by monocrystalline 3C-SiC on SOI electrostatic MEMS resonators L Belsito, M Bosi, F Mancarella, M Ferri, A Roncaglia Journal of Microelectromechanical Systems 29 (1), 117-128, 2019 | 18 | 2019 |
| Terascale integration via a redesign of the crossbar based on a vertical arrangement of poly-Si nanowires GF Cerofolini, M Ferri, E Romano, F Suriano, GP Veronese, S Solmi, ... Semiconductor science and technology 25 (9), 095011, 2010 | 18 | 2010 |
| Uphill diffusion of ultralow-energy boron implants in preamorphized silicon and silicon-on-insulator M Ferri, S Solmi, D Giubertoni, M Bersani, JJ Hamilton, M Kah, K Kirkby, ... Journal of Applied Physics 102 (10), 2007 | 16 | 2007 |
| Fabrication and packaging techniques for the application of MEMS strain sensors to wireless crack monitoring in ageing civil infrastructures M Ferri, F Mancarella, A Seshia, J Ransley, K Soga, J Zalesky, ... Smart structures and systems 6 (3), 225-238, 2010 | 15 | 2010 |
| Measurement of residual stress and Young’s modulus on micromachined monocrystalline 3C-SiC layers grown on< 111> and< 100> silicon S Sapienza, M Ferri, L Belsito, D Marini, M Zielinski, F La Via, A Roncaglia Micromachines 12 (9), 1072, 2021 | 11 | 2021 |
| Influence of grain size on the thermoelectric properties of polycrystalline silicon nanowires F Suriano, M Ferri, F Moscatelli, F Mancarella, L Belsito, S Solmi, ... Journal of Electronic Materials 44, 371-376, 2015 | 10 | 2015 |
| Phonon scattering enhancement in silicon nanolayers D Narducci, G Cerofolini, M Ferri, F Suriano, F Mancarella, L Belsito, ... Journal of materials science 48 (7), 2779-2784, 2013 | 10 | 2013 |
| Crossbar architecture for tera-scale integration GF Cerofolini, M Ferri, E Romano, F Suriano, GP Veronese, S Solmi, ... Semiconductor science and technology 26 (4), 045005, 2011 | 10 | 2011 |
| Micro-Opto-Mechanical technology for the fabrication of highly miniaturized fiber-optic ultrasonic detectors L Belsito, F Mancarella, M Ferri, A Roncaglia, E Biagi, S Cerbai, L Masotti, ... 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 9 | 2011 |
| Fabrication and testing of a high resolution extensometer based on resonant MEMS strain sensors M Ferri, L Belsito, F Mancarella, L Masini, A Roncaglia, J Yan, AA Seshia, ... 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 9 | 2011 |
