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Joseph J Kopanski
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Scanning capacitance microscopy measurements and modeling: Progress towards dopant profiling of silicon
JJ Kopanski, JF Marchiando, JR Lowney
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
1521996
Influence of Metal–MoS2 Interface on MoS2 Transistor Performance: Comparison of Ag and Ti Contacts
H Yuan, G Cheng, L You, H Li, H Zhu, W Li, JJ Kopanski, YS Obeng, ...
ACS applied materials & interfaces 7 (2), 1180-1187, 2015
1232015
Calibrated nanoscale dopant profiling using a scanning microwave microscope
HP Huber, I Humer, M Hochleitner, M Fenner, M Moertelmaier, C Rankl, ...
Journal of Applied Physics 111 (1), 2012
1202012
Characterization of two‐dimensional dopant profiles: Status and review
AC Diebold, MR Kump, JJ Kopanski, DG Seiler
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
1191996
Thermal oxidation of 3C silicon carbide single‐crystal layers on silicon
CD Fung, JJ Kopanski
Applied physics letters 45 (7), 757-759, 1984
1061984
Two‐dimensional scanning capacitance microscopy measurements of cross‐sectioned very large scale integration test structures
G Neubauer, A Erickson, CC Williams, JJ Kopanski, M Rodgers, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1996
1021996
Method and reference standards for measuring overlay in multilayer structures, and for calibrating imaging equipment as used in semiconductor manufacturing
MW Cresswell, RA Allen, JJ Kopanski, LW Linholm
US Patent 5,617,340, 1997
911997
Precise alignment of single nanowires and fabrication of nanoelectromechanical switch and other test structures
Q Li, SM Koo, CA Richter, MD Edelstein, JE Bonevich, JJ Kopanski, ...
IEEE Transactions on Nanotechnology 6 (2), 256-262, 2007
772007
Scanning capacitance microscopy measurement of two-dimensional dopant profiles across junctions
JJ Kopanski, JF Marchiando, DW Berning, R Alvis, HE Smith
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998
631998
Silicon nanowire on oxide/nitride/oxide for memory application
Q Li, X Zhu, HD Xiong, SM Koo, DE Ioannou, JJ Kopanski, JS Suehle, ...
Nanotechnology 18 (23), 235204, 2007
612007
Boron‐implanted 6H‐SiC diodes
M Ghezzo, DM Brown, E Downey, J Kretchmer, JJ Kopanski
Applied physics letters 63 (9), 1206-1208, 1993
601993
Model database for determining dopant profiles from scanning capacitance microscope measurements
JF Marchiando, JJ Kopanski, JR Lowney
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 1998
551998
Quantitative scanning capacitance microscopy analysis of two-dimensional dopant concentrations at nanoscale dimensions
A Erickson, L Sadwick, G Neubauer, J Kopanski, D Adderton, M Rogers
Journal of electronic materials 25, 301-304, 1996
551996
Scanning capacitance microscopy applied to two-dimensional dopant profiling of semiconductors
JJ Kopanski, JF Marchiando, JR Lowney
Materials Science and Engineering: B 44 (1-3), 46-51, 1997
521997
Ultrahigh-temperature microwave annealing of Al+-and P+-implanted 4H-SiC
SG Sundaresan, MV Rao, Y Tian, MC Ridgway, JA Schreifels, ...
Journal of applied physics 101 (7), 2007
472007
Carrier concentration dependence of the scanning capacitance microscopy signal in the vicinity of junctions
JJ Kopanski, JF Marchiando, BG Rennex
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2000
452000
Factors influencing the capacitance–voltage characteristics measured by the scanning capacitance microscope
GH Buh, JJ Kopanski, JF Marchiando, AG Birdwell, Y Kuk
Journal of applied physics 94 (4), 2680-2685, 2003
442003
Behavior of inversion layers in 3C silicon carbide
RE Avila, JJ Kopanski, CD Fung
Applied physics letters 49 (6), 334-336, 1986
411986
Specific contact resistivity of metal-semiconductor contacts-a new, accurate method linked to spreading resistance
GP Carver, JJ Kopanski, DB Novotny, RA Forman
IEEE transactions on electron devices 35 (4), 489-497, 1988
341988
Regression procedure for determining the dopant profile in semiconductors from scanning capacitance microscopy data
JF Marchiando, JJ Kopanski
Journal of applied physics 92 (10), 5798-5809, 2002
322002
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