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N. Chiodarelli
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Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects
N Chiodarelli, S Masahito, Y Kashiwagi, Y Li, K Arstila, O Richard, DJ Cott, ...
Nanotechnology 22 (8), 085302, 2011
1252011
Integration and electrical characterization of carbon nanotube via interconnects
Y Li, DJ Cott, S Mertens, N Peys, M Heyns, S De Gendt, G Groeseneken, ...
Microelectronic Engineering 88 (5), 837-843, 2011
782011
Correlation between number of walls and diameter in multiwall carbon nanotubes grown by chemical vapor deposition
N Chiodarelli, O Richard, H Bender, M Heyns, S De Gendt, ...
Carbon 50 (5), 1748-1752, 2012
742012
Three-dimensional analysis of carbon nanotube networks in interconnects by electron tomography without missing wedge artifacts
X Ke, S Bals, D Cott, T Hantschel, H Bender, G Van Tendeloo
Microscopy and Microanalysis 16 (2), 210-217, 2010
73*2010
Electrical characterization of CNT contacts with Cu Damascene top contact
MH Van Der Veen, B Vereecke, C Huyghebaert, DJ Cott, M Sugiura, ...
Microelectronic engineering 106, 106-111, 2013
372013
Integration of vertical carbon nanotube bundles for interconnects
N Chiodarelli, K Kellens, DJ Cott, N Peys, K Arstila, M Heyns, S De Gendt, ...
Journal of The Electrochemical Society 157 (10), K211, 2010
372010
Carbon nanotubes horizontal interconnects with end-bonded contacts, diameters down to 50 nm and lengths up to 20 μm
N Chiodarelli, A Fournier, H Okuno, J Dijon
Carbon 60, 139-145, 2013
242013
Alternative photoresist removal process to minimize damage of low-k material induced by ash plasma
QT Le, J Keldermans, N Chiodarelli, E Kesters, M Lux, M Claes, ...
Japanese journal of applied physics 47 (8S2), 6870, 2008
212008
Roll to roll coating of carbon nanotube films for electro thermal heating
T Rashid, HL Liang, M Taimur, N Chiodarelli, HA Khawaja, K Edvardsen, ...
Cold Regions Science and Technology 182, 103210, 2021
182021
Impact of the contact's geometry on the line resistivity of carbon nanotubes bundles for applications as horizontal interconnects
N Chiodarelli, A Fournier, J Dijon
Applied Physics Letters 103 (5), 2013
182013
ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
N Chiodarelli, A Delabie, S Masahito, Y Kashiwagi, O Richard, H Bender, ...
MRS Proceedings 1283, mrsf10-1283-b10-10, 2011
112011
Carbon nanotube interconnects: Electrical characterization of 150 nm CNT contacts with Cu damascene top contact
N Chiodarelli, MH van der Veen, B Vereecke, DJ Cott, G Groeseneken, ...
2011 IEEE International Interconnect Technology Conference, 1-3, 2011
82011
High-throughput and consistent production of aqueous suspensions of single-wall carbon nanotubes
N Chiodarelli, M De Volder
Carbon 145, 757-763, 2019
72019
Horizontal carbon nanotube interconnects for advanced integrated circuits.
J Dijon, N Chiodarelli, A Fournier, H Okuno, R Ramos
MRS Online Proceedings Library (OPL) 1559, mrss13-1559-aa02-01, 2013
72013
Integration of carbon nanotubes as future interconnections for sub-32nm technologies
N Chiodarelli
62011
Growth mechanism of a hybrid structure consisting of a graphite layer on top of vertical carbon nanotubes
N Chiodarelli, C Xu, O Richard, H Bender, A Klekachev, M Cooke, ...
Journal of Nanomaterials 2012, 16-16, 2012
52012
Integration of vertical carbon nanotube bundles for interconnects
N Chiodarelli, K Kellens, DJ Cott, N Peys, K Arstila, MM Heyns, ...
ECS Transactions 19 (24), 11, 2009
42009
CMP of novel materials
P Ong, K Kellens, N Chiodarelli, M Meuris, P Leunissen
Proceedings of SEMICON Korea: STS-SEMI Technology Symposium, 2010
32010
Growth and integration of high-density CNT for BEOL interconnects
A Romo Negreira, D Cott, A Verhulst, S Cruz Esconjauregui, N Chiodarelli, ...
Materials and Processes for Advanced Interconnects for Microelectronics 1079 …, 2008
32008
A CMOS compatible carbon nanotube growth approach
D Cott, M Sugiura, N Chiodarelli, K Arstila, PM Vereecken, B Vereecke, ...
MRS Online Proceedings Library (OPL) 1284, mrsf10-1284-c04-11, 2011
22011
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