Richard S. Muller
Richard S. Muller
Verified email at eecs.berkeley.edu
Title
Cited by
Cited by
Year
Device electronics for integrated circuits
RS Muller, TI Kamins, M Chan, PK Ko
Wiley 2, 54, 1986
24281986
Handbook of micro/nano tribology
B Bushan
CRC press, 2020
16652020
Surface micromachining for microelectromechanical systems
JM Bustillo, RT Howe, RS Muller
Proceedings of the IEEE 86 (8), 1552-1574, 1998
9261998
Etch rates for micromachining processing
KR Williams, RS Muller
Journal of Microelectromechanical systems 5 (4), 256-269, 1996
9101996
IC-processed electrostatic micromotors
LS Fan, YC Tai, RS Muller
Sensors and actuators 20 (1-2), 41-47, 1989
4661989
Integrated movable micromechanical structures for sensors and actuators
LS Fan, YC Tai, RS Muller
IEEE Transactions on Electron Devices 35 (6), 724-730, 1988
4351988
Magnetically actuated, addressable microstructures
JW Judy, RS Muller
Journal of Microelectromechanical systems 6 (3), 249-256, 1997
3671997
Resonant-microbridge vapor sensor
RT Howe, RS Muller
IEEE Transactions on Electron Devices 33 (4), 499-506, 1986
3301986
Silicon-processed overhanging microgripper
CJ Kim, AP Pisano, RS Muller
Journal of Microelectromechanical Systems 1 (1), 31-36, 1992
3101992
IC-processed electrostatic micro-motors
LS Fan, YC Tai, RS Muller
IEEE, 1988
3101988
Silicon-processed microneedles
L Lin, AP Pisano
Journal of Microelectromechanical Systems 8 (1), 78-84, 1999
2991999
Surface-micromachined microoptical elements and systems
RS Muller, KY Lau
Proceedings of the IEEE 86 (8), 1705-1720, 1998
2661998
IC-processed electrostatic synchronous micromotors
YC Tai, RS Muller
Sensors and Actuators 20 (1-2), 49-55, 1989
2451989
Polycrystalline silicon micromechanical beams
RT Howe, RS Muller
Journal of the Electrochemical Society 130 (6), 1420, 1983
2401983
Silicon micromechanics: sensors and actuators on a chip
RT Howe, RS Muller, KJ Gabriel, WSN Trimmer
IEEE spectrum 27 (7), 29-31, 1990
2361990
Hydrogen in lithium niobate
JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez
Advances in Physics 45 (5), 349-392, 1996
2321996
Investigation of porous silicon for vapor sensing
RC Anderson, RS Muller, CW Tobias
Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989
2201989
Polysilicon microgripper
CJ Kim, AP Pisano, RS Muller, MG Lim
Sensors and Actuators A: Physical 33 (3), 221-227, 1992
2181992
A flat high-frequency scanning micromirror
RA Conant, JT Nee, KY Lau, RS Muller
Proc. Solid-State Sensor and Actuator Workshop, 6-9, 2000
2162000
Stroboscopic interferometer system for dynamic MEMS characterization
MR Hart, RA Conant, KY Lau, RS Muller
Journal of microelectromechanical systems 9 (4), 409-418, 2000
2142000
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