Device electronics for integrated circuits RS Muller, TI Kamins, M Chan, PK Ko Wiley 2, 54, 1986 | 2428 | 1986 |
Handbook of micro/nano tribology B Bushan CRC press, 2020 | 1665 | 2020 |
Surface micromachining for microelectromechanical systems JM Bustillo, RT Howe, RS Muller Proceedings of the IEEE 86 (8), 1552-1574, 1998 | 926 | 1998 |
Etch rates for micromachining processing KR Williams, RS Muller Journal of Microelectromechanical systems 5 (4), 256-269, 1996 | 910 | 1996 |
IC-processed electrostatic micromotors LS Fan, YC Tai, RS Muller Sensors and actuators 20 (1-2), 41-47, 1989 | 466 | 1989 |
Integrated movable micromechanical structures for sensors and actuators LS Fan, YC Tai, RS Muller IEEE Transactions on Electron Devices 35 (6), 724-730, 1988 | 435 | 1988 |
Magnetically actuated, addressable microstructures JW Judy, RS Muller Journal of Microelectromechanical systems 6 (3), 249-256, 1997 | 367 | 1997 |
Resonant-microbridge vapor sensor RT Howe, RS Muller IEEE Transactions on Electron Devices 33 (4), 499-506, 1986 | 330 | 1986 |
Silicon-processed overhanging microgripper CJ Kim, AP Pisano, RS Muller Journal of Microelectromechanical Systems 1 (1), 31-36, 1992 | 310 | 1992 |
IC-processed electrostatic micro-motors LS Fan, YC Tai, RS Muller IEEE, 1988 | 310 | 1988 |
Silicon-processed microneedles L Lin, AP Pisano Journal of Microelectromechanical Systems 8 (1), 78-84, 1999 | 299 | 1999 |
Surface-micromachined microoptical elements and systems RS Muller, KY Lau Proceedings of the IEEE 86 (8), 1705-1720, 1998 | 266 | 1998 |
IC-processed electrostatic synchronous micromotors YC Tai, RS Muller Sensors and Actuators 20 (1-2), 49-55, 1989 | 245 | 1989 |
Polycrystalline silicon micromechanical beams RT Howe, RS Muller Journal of the Electrochemical Society 130 (6), 1420, 1983 | 240 | 1983 |
Silicon micromechanics: sensors and actuators on a chip RT Howe, RS Muller, KJ Gabriel, WSN Trimmer IEEE spectrum 27 (7), 29-31, 1990 | 236 | 1990 |
Hydrogen in lithium niobate JM Cabrera, J Olivares, M Carrascosa, J Rams, R Müller, E Diéguez Advances in Physics 45 (5), 349-392, 1996 | 232 | 1996 |
Investigation of porous silicon for vapor sensing RC Anderson, RS Muller, CW Tobias Lawrence Livermore National Lab.(LLNL), Livermore, CA (United States …, 1989 | 220 | 1989 |
Polysilicon microgripper CJ Kim, AP Pisano, RS Muller, MG Lim Sensors and Actuators A: Physical 33 (3), 221-227, 1992 | 218 | 1992 |
A flat high-frequency scanning micromirror RA Conant, JT Nee, KY Lau, RS Muller Proc. Solid-State Sensor and Actuator Workshop, 6-9, 2000 | 216 | 2000 |
Stroboscopic interferometer system for dynamic MEMS characterization MR Hart, RA Conant, KY Lau, RS Muller Journal of microelectromechanical systems 9 (4), 409-418, 2000 | 214 | 2000 |