| Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas A Dolgov, D Lopaev, T Rachimova, A Kovalev, A Vasil'Eva, CJ Lee, ... Journal of Physics D: Applied Physics 47 (6), 065205, 2014 | 57 | 2014 |
| Expansion and fragmentation of a liquid-metal droplet by a short laser pulse SY Grigoryev, BV Lakatosh, MS Krivokorytov, VV Zhakhovsky, ... Physical Review Applied 10 (6), 064009, 2018 | 49 | 2018 |
| Photon source, metrology apparatus, lithographic system and device manufacturing method HPM Pellemans, PS Antsiferov, VM Krivtsun, JMM De Wit, ... US Patent 8,921,814, 2014 | 48 | 2014 |
| Removal of amorphous C and Sn on Mo: Si multilayer mirror surface in Hydrogen plasma and afterglow OV Braginsky, AS Kovalev, DV Lopaev, EM Malykhin, TV Rakhimova, ... Journal of Applied Physics 111 (9), 2012 | 45 | 2012 |
| Fragmentation dynamics of liquid–metal droplets under ultra-short laser pulses MM Basko, MS Krivokorytov, AY Vinokhodov, YV Sidelnikov, VM Krivtsun, ... Laser Physics Letters 14 (3), 036001, 2017 | 44 | 2017 |
| Exploring the electron density in plasma induced by EUV radiation: I. Experimental study in hydrogen RM Van Der Horst, J Beckers, EA Osorio, DI Astakhov, WJ Goedheer, ... Journal of Physics D: Applied Physics 49 (14), 145203, 2016 | 43 | 2016 |
| Diode laser study of IR multiphoton-induced depletion of rotational sublevels of the ground vibrational state of SF6 molecules cooled in a pulsed free jet VM Apatin, VM Krivtsun, YA Kuritsyn, GN Makarov, I Pak Optics communications 47 (4), 251-256, 1983 | 43 | 1983 |
| Cavitation and spallation in liquid metal droplets produced by subpicosecond pulsed laser radiation MS Krivokorytov, AY Vinokhodov, YV Sidelnikov, VM Krivtsun, ... Physical Review E 95 (3), 031101, 2017 | 41 | 2017 |
| Exploring the electron density in plasma induced by EUV radiation: II. Numerical studies in argon and hydrogen DI Astakhov, WJ Goedheer, CJ Lee, VV Ivanov, VM Krivtsun, KN Koshelev, ... Journal of Physics D: Applied Physics 49 (29), 295204, 2016 | 37 | 2016 |
| Stable droplet generator for a high brightness laser produced plasma extreme ultraviolet source A Vinokhodov, M Krivokorytov, Y Sidelnikov, V Krivtsun, V Medvedev, ... Review of Scientific Instruments 87 (10), 2016 | 32 | 2016 |
| Formation of a fine-dispersed liquid-metal target under the action of femto-and picosecond laser pulses for a laser-plasma radiation source in the extreme ultraviolet range AY Vinokhodov, KN Koshelev, VN Krivtsun, MS Krivokorytov, ... Quantum Electronics 46 (1), 23, 2016 | 30 | 2016 |
| RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation KN Koshelev, VV Ivanov, VG Novikov, V Medvedev, AS Grushin, ... Journal of Micro/Nanolithography, MEMS, and MOEMS 11 (2), 021112-021112, 2012 | 29 | 2012 |
| Ex-situ removal of deposition on an optical element VY Banine, LA Wildenberg, VM Krivtsun, AM Struycken, JB Ridder, ... US Patent 7,372,058, 2008 | 29 | 2008 |
| Calculation of tin emission spectra in discharge plasma: The influence of reabsorption in spectral lines VG Novikov, VV Ivanov, KN Koshelev, VM Krivtsun, AD Solomyannaya High Energy Density Physics 3 (1-2), 198-203, 2007 | 29 | 2007 |
| Shaping and controlled fragmentation of liquid metal droplets through cavitation MS Krivokorytov, Q Zeng, BV Lakatosh, AY Vinokhodov, YV Sidelnikov, ... Scientific reports 8 (1), 597, 2018 | 27 | 2018 |
| Extreme ultraviolet (EUV) source and ultra-high vacuum chamber for studying EUV-induced processes A Dolgov, O Yakushev, A Abrikosov, E Snegirev, VM Krivtsun, CJ Lee, ... Plasma Sources Science and Technology 24 (3), 035003, 2015 | 27 | 2015 |
| Ir absorption spectrum of CrO2Cl2 molecules for high-lying states of the vibrational quasi-continuum AV Evseev, VM Krivtsun, YA Kuritsyn, AA Makarov, AA Puretzky, ... Chemical physics 106 (1), 131-149, 1986 | 27 | 1986 |
| Propulsion of a flat tin target with pulsed CO2 laser radiation: measurements using a ballistic pendulum BV Lakatosh, DB Abramenko, VV Ivanov, VV Medvedev, VM Krivtsun, ... Laser Physics Letters 15 (1), 016003, 2017 | 25 | 2017 |
| Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors VV Medvedev, AJR Van den Boogaard, R Van der Meer, AE Yakshin, ... Optics express 21 (14), 16964-16974, 2013 | 24 | 2013 |
| Ex-situ removal of deposition on an optical element VY Banine, VV Ivanov, JJ Smits, HJ Voorma, LA Van Den Wildenberg, ... US Patent 7,767,989, 2010 | 24 | 2010 |
