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Lanyu Zhang
Lanyu Zhang
Rensselaer Polytechnic Institute, GUT
Verified email at rpi.edu
Title
Cited by
Cited by
Year
A Rapid Vibration Reduction Method for Macro-micro Composite Precision Positioning Stage
L Zhang, J Gao, X Chen, H Tang, Y Chen, Y He, Z Yang
IEEE Transactions on Industrial Electronics, 0
25
Development and Modeling of a Macro/Micro Composite Positioning System for Microelectronics Manufacturing.
L Zhang, J Gao, H Tang
Key Engineering Materials 679, 2016
32016
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Articles 1–2