| Subwavelength coherent imaging of periodic samples using a 13.5 nm tabletop high-harmonic light source DF Gardner, M Tanksalvala, ER Shanblatt, X Zhang, BR Galloway, ... Nature Photonics 11 (4), 259-263, 2017 | 197 | 2017 |
| Nondestructive, high-resolution, chemically specific 3D nanostructure characterization using phase-sensitive EUV imaging reflectometry M Tanksalvala, CL Porter, Y Esashi, B Wang, NW Jenkins, Z Zhang, ... Science Advances 7 (5), eabd9667, 2021 | 68 | 2021 |
| Ptychographic hyperspectral spectromicroscopy with an extreme ultraviolet high harmonic comb B Zhang, DF Gardner, MH Seaberg, ER Shanblatt, CL Porter, R Karl, ... Optics express 24 (16), 18745-18754, 2016 | 63 | 2016 |
| Synergistic effect of Bi-doped exfoliated MoS 2 nanosheets on their bactericidal and dye degradation potential U Qumar, M Ikram, M Imran, A Haider, A Ul-Hamid, J Haider, KN Riaz, ... Dalton Transactions 49 (16), 5362-5377, 2020 | 58 | 2020 |
| Quantitative chemically specific coherent diffractive imaging of reactions at buried interfaces with few nanometer precision ER Shanblatt, CL Porter, DF Gardner, GF Mancini, RM Karl Jr, ... Nano letters 16 (9), 5444-5450, 2016 | 50 | 2016 |
| General-purpose, wide field-of-view reflection imaging with a tabletop 13 nm light source CL Porter, M Tanksalvala, M Gerrity, G Miley, X Zhang, C Bevis, ... Optica 4 (12), 1552-1557, 2017 | 41 | 2017 |
| Spatial, spectral, and polarization multiplexed ptychography R Karl, C Bevis, R Lopez-Rios, J Reichanadter, D Gardner, C Porter, ... Optics express 23 (23), 30250-30258, 2015 | 39 | 2015 |
| Full-field imaging of thermal and acoustic dynamics in an individual nanostructure using tabletop high harmonic beams RM Karl Jr, GF Mancini, JL Knobloch, TD Frazer, JN Hernandez-Charpak, ... Science advances 4 (10), eaau4295, 2018 | 36 | 2018 |
| Multiple beam ptychography for large field-of-view, high throughput, quantitative phase contrast imaging C Bevis, R Karl Jr, J Reichanadter, DF Gardner, C Porter, E Shanblatt, ... Ultramicroscopy 184, 164-171, 2018 | 21 | 2018 |
| High-resolution wavefront sensing and aberration analysis of multi-spectral extreme ultraviolet beams M Du, X Liu, A Pelekanidis, F Zhang, L Loetgering, P Konold, CL Porter, ... Optica 10 (2), 255-263, 2023 | 13 | 2023 |
| RK Jr, C DF Gardner, M Tanksalvala, ER Shanblatt, X Zhang, BR Galloway, ... Bevis, DE Adams, HC Kapteyn, MM Murnane, and GF Mancini,“Subwavelength …, 0 | 8 | |
| Quantitative chemically-specific coherent diffractive imaging of buried interfaces using a tabletop EUV nanoscope ER Shanblatt, CL Porter, DF Gardner, GF Mancini, RM Karl Jr, ... arXiv preprint arXiv:1603.01301, 2016 | 6 | 2016 |
| Two-tone frequency-modulation stimulated Rayleigh spectroscopy GW Faris, A Markosyan, CL Porter, S Doshay Optics Letters 39 (15), 4615-4618, 2014 | 6 | 2014 |
| Soft x-ray: novel metrology for 3D profilometry and device pitch overlay C Porter, T Coenen, N Geypen, S Scholz, L van Rijswijk, HK Nienhuys, ... Metrology, Inspection, and Process Control XXXVII 12496, 412-420, 2023 | 5 | 2023 |
| Complex Spatially-Resolved Reflectometry/Refractometry C Porter, DE Adams, M Tanksalvala, E Shanblatt, MM Murnane, ... US Patent App. 16/303,059, 2019 | 5 | 2019 |
| Reflection Mode Tabletop Coherent Diffraction Imaging of Buried Nanostructures ER Shanblatt, CL Porter, DF Gardner, GF Mancini, R Karl, C Bevis, ... Frontiers in Optics, FW6B. 2, 2015 | 3 | 2015 |
| Stroboscopic Imaging of Acoustic Waves in Nanostructures using Tabletop High Harmonics R Karl, G Mancini, D Gardner, J Knobloch, T Frazer, ... Computational Optical Sensing and Imaging, CW1B. 2, 2017 | 2 | 2017 |
| Full-field functional imaging of nanoscale dynamics using tabletop high harmonics RM Karl, GF Mancini, D Gardner, E Shanblatt, J Knobloch, T Frazer, ... CLEO: Applications and Technology, JTh5C. 8, 2017 | 2 | 2017 |
| Sub-wavelength transmission and reflection mode tabletop imaging with 13nm illumination via ptychography CDI M Tanksalvala, CL Porter, DF Gardner Jr, M Gerrity, GF Mancini, X Zhang, ... Metrology, Inspection, and Process Control for Microlithography XXXI 10145 …, 2017 | 2 | 2017 |
| Method for correcting measurements in the manufacture of integrated circuits and associated apparatuses HK Nienhuys, TJ Coenen, SB Roobol, J Cottaar, SI Mossavat, N Geypen, ... US Patent App. 17/787,253, 2023 | 1 | 2023 |
Gregory W FarisProgram Manager, SRI InternationalVerified email at sri.com
