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Andrea Severino
Andrea Severino
Wide bandgap compound semiconductor epitaxy, R&D dept, STMicroelectronics
Verified email at st.com
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Cited by
Year
From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction
F La Via, A Severino, R Anzalone, C Bongiorno, G Litrico, M Mauceri, ...
Materials Science in Semiconductor Processing 78, 57-68, 2018
1202018
Thin crystalline 3C-SiC layer growth through carbonization of differently oriented Si substrates
A Severino, G D’arrigo, C Bongiorno, S Scalese, F La Via, G Foti
Journal of Applied Physics 102 (2), 2007
862007
High-quality 6 inch (111) 3C-SiC films grown on off-axis (111) Si substrates
A Severino, C Bongiorno, N Piluso, M Italia, M Camarda, M Mauceri, ...
Thin Solid Films 518 (6), S165-S169, 2010
732010
Heteroepitaxy of 3C-SiC on different on-axis oriented silicon substrates
R Anzalone, A Severino, G D’arrigo, C Bongiorno, G Abbondanza, G Foti, ...
Journal of Applied Physics 105 (8), 2009
682009
Structural defects in (100) 3C-SiC heteroepitaxy: Influence of the buffer layer morphology on generation and propagation of stacking faults and microtwins
A Severino, C Frewin, C Bongiorno, R Anzalone, SE Saddow, F La Via
Diamond and related materials 18 (12), 1440-1449, 2009
512009
3C-SiC film growth on Si substrates
A Severino, C Locke, R Anzalone, M Camarda, N Piluso, A La Magna, ...
ECS Transactions 35 (6), 99, 2011
352011
Effect of the miscut direction in (111) 3C-SiC film growth on off-axis (111) Si
A Severino, M Camarda, G Condorelli, LMS Perdicaro, R Anzalone, ...
Applied physics letters 94 (10), 2009
342009
Temperature-dependent Fowler-Nordheim electron barrier height in SiO2/4H-SiC MOS capacitors
P Fiorenza, M Vivona, F Iucolano, A Severino, S Lorenti, G Nicotra, ...
Materials Science in Semiconductor Processing 78, 38-42, 2018
302018
Conduction mechanisms at interface of AlN/SiN dielectric stacks with AlGaN/GaN heterostructures for normally-off high electron mobility transistors: Correlating device behavior …
G Greco, P Fiorenza, F Iucolano, A Severino, F Giannazzo, F Roccaforte
ACS applied materials & interfaces 9 (40), 35383-35390, 2017
292017
Extended study of the step-bunching mechanism during the homoepitaxial growth of SiC
M Camarda, A La Magna, A Severino, F La Via
Thin Solid Films 518 (6), S159-S161, 2010
292010
Effect of high temperature annealing (T> 1650 C) on the morphological and electrical properties of p-type implanted 4H-SiC layers
M Spera, D Corso, S Di Franco, G Greco, A Severino, P Fiorenza, ...
Materials Science in Semiconductor Processing 93, 274-279, 2019
282019
Preferential oxidation of stacking faults in epitaxial off-axis (111) 3C-SiC films
A Severino, M Camarda, S Scalese, P Fiorenza, S Di Franco, ...
Applied Physics Letters 95 (11), 2009
272009
SiC films and coatings: amorphous, polycrystalline, and single crystal forms
CW Locke, A Severino, F La Via, M Reyes, J Register, SE Saddow
Silicon carbide biotechnology, 17-61, 2011
262011
Growth rate effect on 3C-SiC film residual stress on (100) Si substrates
R Anzalone, C Locke, J Carballo, N Piluso, A Severino, G D'Arrigo, ...
Materials Science Forum 645, 143-146, 2010
252010
Heteroepitaxial growth of (111) 3C-SiC on (110) Si substrate by second order twins
R Anzalone, C Bongiorno, A Severino, G D’Arrigo, G Abbondanza, G Foti, ...
Applied Physics Letters 92 (22), 2008
252008
Low stress heteroepitaxial 3C-SiC films characterized by microstructure fabrication and finite elements analysis
R Anzalone, M Camarda, C Locke, D Alquier, A Severino, M Italia, ...
Journal of The Electrochemical Society 157 (4), H438, 2010
232010
Microtwin reduction in 3C–SiC heteroepitaxy
A Severino, F La Via
Applied Physics Letters 97 (18), 2010
212010
Raman characterization of doped 3C-SiC/Si for different silicon substrates and C/Si ratios
N Piluso, A Severino, M Camarda, R Anzalone, A Canino, G Condorelli, ...
Materials Science Forum 645, 255-258, 2010
212010
Patterned substrate with inverted silicon pyramids for 3C–SiC epitaxial growth: A comparison with conventional (001) Si substrate
F La Via, G D’Arrigo, A Severino, N Piluso, M Mauceri, C Locke, ...
Journal of Materials Research 28 (1), 94-103, 2013
162013
3C-SiC epitaxial growth on large area silicon: Thin films
A Severino
Silicon Carbide Epitaxy 37, 145-191, 2012
162012
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