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Efe Kemaneci
Efe Kemaneci
Dr.
Verified email at rub.de
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Year
Global (volume-averaged) model of inductively coupled chlorine plasma: influence of Cl wall recombination and external heating on continuous and pulse-modulated plasmas
E Kemaneci, E Carbone, JP Booth, W Graef, J van Dijk, G Kroesen
Plasma Sources Science and Technology 23 (4), 045002, 2014
282014
A computational analysis of the vibrational levels of molecular oxygen in low-pressure stationary and transient radio-frequency oxygen plasma
E Kemaneci, JP Booth, P Chabert, J van Dijk, T Mussenbrock, ...
Plasma Sources Science and Technology 25 (2), 025025, 2016
272016
A two-dimensional modelling study of a coaxial plasma waveguide
S Rahimi, M Jimenez-Diaz, S Hübner, EH Kemaneci, J Van der Mullen, ...
Journal of Physics D: Applied Physics 47 (12), 125204, 2014
242014
A numerical analysis of a microwave induced coaxial surface wave discharge fed with a mixture of oxygen and hexamethyldisiloxane for the purpose of deposition
E Kemaneci, F Mitschker, J Benedikt, D Eremin, P Awakowicz, ...
Plasma Sources Science and Technology 28 (11), 115003, 2019
192019
Zero-dimensional and pseudo-one-dimensional models of atmospheric-pressure plasma jets in binary and ternary mixtures of oxygen and nitrogen with helium background
Y He, P Preissing, D Steuer, M Klich, V Schulz-von der Gathen, M Böke, ...
Plasma Sources Science and Technology 30 (10), 105017, 2021
172021
Modelling of an intermediate pressure microwave oxygen discharge reactor: from stationary two-dimensional to time-dependent global (volume-averaged) plasma models
E Kemaneci, E Carbone, M Jimenez-Diaz, W Graef, S Rahimi, J van Dijk, ...
Journal of Physics D: Applied Physics 48 (43), 435203, 2015
162015
Modelling of plasmas with complex chemistry: application to microwave deposition reactors
EH Kemaneci
162014
A global model of cylindrical and coaxial surface-wave discharges
E Kemaneci, F Mitschker, M Rudolph, D Szeremley, D Eremin, ...
Journal of Physics D: Applied Physics 50 (24), 245203, 2017
142017
Simplifying plasma chemistry via ILDM
T Rehman, E Kemaneci, W Graef, J Van Dijk
Journal of Physics: Conference Series 682 (1), 012035, 2016
112016
Modeling of very high frequency large-electrode capacitively coupled plasmas with a fully electromagnetic particle-in-cell code
D Eremin, E Kemaneci, M Matsukuma, T Mussenbrock, RP Brinkmann
Plasma Sources Science and Technology 32 (4), 044007, 2023
52023
PECVD and PEALD on polymer substrates (part II): Understanding and tuning of barrier and membrane properties of thin films
T De Los Arcos, P Awakowicz, M Böke, N Boysen, RP Brinkmann, ...
Plasma Processes and Polymers 21 (3), 2300186, 2024
22024
On the justification of the Poisson–Boltzmann equation in the context of technological plasmas
K Köhn, D Krüger, E Kemaneci, L Xu, D Eremin, RP Brinkmann
Plasma Sources Science and Technology 30 (10), 105014, 2021
22021
Modelling of a miniature microwave driven nitrogen plasma jet and comparison to measurements
M Klute, E Kemaneci, HE Porteanu, I Stefanović, W Heinrich, ...
Plasma Sources Science and Technology 30 (6), 065014, 2021
22021
Evaluation of a measure on the quasi-steady state assumption of Collisional Radiative Models via Intrinsic Low Dimensional Manifold Technique
GK Efe Kemaneci, Emile Carbone, Wouter Graef, Jan van Dijk
Arxiv, 2015
1*2015
Numerical investigation of a DC glow discharge in an Argon gas: two-component plasma model
EH Kemaneci
Middle East Technical University, 2009
12009
PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films
T Arcos, P Awakowicz, M Böke, N Boysen, RP Brinkmann, R Dahlmann, ...
arXiv preprint arXiv:2306.14797, 2023
2023
Generation of energetic electrons by surface waves in VHF CCPs
D Eremin, E Kemaneci, M Matsukuma, I Kaganovich, T Mussenbrock, ...
arXiv preprint arXiv:2302.12499, 2023
2023
Electromagnetic particle-in-cell simulations of surface wave effects in various plasmas
D Eremin, E Kemaneci, P Awakowicz, T Mussenbrock, RP Brinkmann
APS Annual Gaseous Electronics Meeting Abstracts, GF2. 001, 2023
2023
EUV-induced plasma: PIC modelling of a transient plasma fluxes
L Heijmans, D Astakhov, E Kemaneci, A Yakunin, M van de Kerkhof
APS Annual Gaseous Electronics Meeting Abstracts, FT3. 003, 2023
2023
3-dimensional semi-analytic model of a microwave driven miniature plasma jet
M Klute, E Kemaneci, HE Porteanu, I Stefanovic, W Heinrich, ...
2022 IEEE International Conference on Plasma Science (ICOPS), 1-1, 2022
2022
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Articles 1–20