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Guo-Lun Luo
Guo-Lun Luo
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Cited by
Cited by
Year
Effects of DC bias tuning on air-coupled PZT piezoelectric micromachined ultrasonic transducers
Y Kusano, Q Wang, GL Luo, Y Lu, RQ Rudy, RG Polcawich, DA Horsley
journal of microelectromechanical systems 27 (2), 296-304, 2018
602018
Airborne piezoelectric micromachined ultrasonic transducers for long-range detection
GL Luo, Y Kusano, DA Horsley
journal of microelectromechanical systems 30 (1), 81-89, 2020
542020
High-SPL air-coupled piezoelectric micromachined ultrasonic transducers based on 36% ScAlN thin-film
Y Kusano, I Ishii, T Kamiya, A Teshigahara, GL Luo, DA Horsley
IEEE transactions on ultrasonics, ferroelectrics, and frequency control 66 …, 2019
492019
36% scandium-doped aluminum nitride piezoelectric micromachined ultrasonic transducers
Y Kusano, GL Luo, D Horsley, I Taru Ishii, A Teshigahara
2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018
262018
High fill factor piezoelectric micromachined ultrasonic transducers on transparent substrates
GL Luo, S Fung, Q Wang, Y Kusano, J Lasiter, D Kidwell, DA Horsley
2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017
202017
High-pressure output 40 kHz air-coupled piezoelectric micromachined ultrasonic transducers
GL Luo, Y Kusano, MN Roberto, DA Horsley
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems …, 2019
192019
Immersion PMUTs fabricated with a low thermal-budget surface micromachining process
GL Luo, Y Kusano, D Horsley
2018 IEEE International Ultrasonics Symposium (IUS), 1-4, 2018
152018
Piezoelectric Micromachined Ultrasonic Transducers with Corrugated Diaphragms Using Surface Micromachining
GL Luo, DA Horsley
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
132019
Increased Output-Pressure PMUTs with a Sloped Profile Fabricated via Surface Micromachining
GL Luo, Q Wang, Y Kusano, D Horsley
2018 IEEE International Frequency Control Symposium (IFCS), 1-4, 2018
132018
Low thermal budget surface micromachining process for piezoelectric micromachined ultrasonic transducer arrays with in-situ vacuum sealed cavities
Q Wang, G Luo, Y Kusano, DA Horsley
Proceedings of the Hilton Head Workshop, 2018
122018
Improving pmut transmit performance via sub-micron thickness scaling
X Jiang, GL Luo, Q Wang, DA Horsley
2018 IEEE International Ultrasonics Symposium (IUS), 1-9, 2018
92018
CMOS-MEMS Fabry-Perot optical interference device with tunable resonant cavity
GL Luo, CC Lee, CL Cheng, MH Tsai, W Fang
2013 Transducers & Eurosensors XXVII: The 17th International Conference on …, 2013
62013
IEEE International Ultrasonics Symposium (IUS)
Y Kusano, G Luo, D Horsley, IT Ishii, A Teshigahara
IEEE 2018, 1-4, 2018
52018
Nanoporous anodic aluminum oxide as a promising material for the electrostatically-controlled thin film interference filter
PH Lo, GL Luo, CC Lee, W Fang
Journal of Micromechanics and Microengineering 25 (2), 025001, 2015
52015
Spurious mode free hexagonal PMUT array
Y Kusano, GL Luo, DA Horsley
2019 20th International Conference on Solid-State Sensors, Actuators and …, 2019
22019
Implementation of nanoporous anodic aluminum oxide layer with different porosities for interferometric RGB color pixels as handheld display application
PH Lo, GL Luo, W Fang
2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015
22015
Process platform for high aspect-ratio self-aligned vertical comb actuators
HT Su, GL Luo, J Hsieh, YC Fu, W Fang
2015 Transducers-2015 18th International Conference on Solid-State Sensors …, 2015
12015
High-Performance Micromachined Ultrasonic Transducers
GL Luo
University of California, Davis, 2019
2019
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