Matthias Bauer

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Peter VerheyenVerified email at imec.be
Ganesh SamudraAssociate Professor, National University of SingaporeVerified email at nus.edu.sg
Frank ErnstProfessor of Materials Science, Case Western Reserve UniversityVerified email at case.edu
Christian TeichertAssociate Professor of Materials Physics, University of Leoben, AustriaVerified email at unileoben.ac.at
Rinus LeeTELVerified email at ieee.org
Oussama MoutanabbirVerified email at polymtl.ca
Andriy HikavyyImecVerified email at imec.be
Tatiana PerovaProfessor, Department of Electronic and Electrical Engineering, Trinity College DublinVerified email at tcd.ie
Samik MukherjeeAssistant Professor at the Jio Institute, Navi Mumbai, IndiaVerified email at jioinstitute.edu.in
Manfred BerrothProfessorVerified email at int.uni-stuttgart.de
Jones AlamiProfessor, Mohammed VI Polytechnic University (UM6P)Verified email at um6p.ma
Stefan ZollnerNew Mexico State UniversityVerified email at nmsu.edu
Ben KaczerimecVerified email at imec.be
Marc Meurisimec / imomecVerified email at imec.be
Christian LavoieIBM T.J. Watson Research CenterVerified email at us.ibm.com
Jean Jordan-SweetIBM T.J. Watson Research CenterVerified email at us.ibm.com
Aaron TheanNational University of SingaporeVerified email at nus.edu.sg
John KouvetakisArizona State UniversityVerified email at asu.edu
Steven J. KoesterProfessor of Electrical & Computer Engineering, University of MinnesotaVerified email at umn.edu
Esteve AmatInstitute of Microelectronics of BarcelonaVerified email at imb-cnm.csic.es

Matthias Bauer

Mattson Technology

Verified email at mattson.com

Si SiGe CVD Epitaxial Growth Semiconductor Manufacturing


Title Sort by citations Sort by year Sort by title	Cited by Cited by	Year
Cyclical Epitaxial Deposition And Etch M Bauer, SG Thomas US Patent 8,367,528, 2013	556	2013
Selective epitaxial formation of semiconductor films M Bauer, KD Weeks US Patent 8,278,176, 2012	507	2012
High throughput cyclical epitaxial deposition and etch process M Bauer US Patent 8,809,170, 2014	456	2014
Apparatus and method for depositing silicon germanium films P Tomasini, M Bauer, N Cody US Patent 2007/0,155,138, 2007	441	2007
Inhibitors for selective deposition of silicon containing films M Bauer, P Tomasini US Patent 7,939,447, 2011	431	2011
Deposition of silicon germanium on silicon-on-insulator structures and bulk substrates M Bauer US Patent 7,208,354, 2007	387	2007
Methods of depositing electrically active doped crystalline Si-containing films M Bauer US Patent 7,687,383, 2010	349	2010
Selective deposition of silicon-containing films M Bauer, C Arena, R Bertram, P Tomasini, N Cody, P Brabant, J Italiano, ... US Patent 7,816,236, 2006	128*	2006
New virtual substrate concept for vertical MOS transistors E Kasper, K Lyutovich, M Bauer, M Oehme Thin Solid Films 336 (1-2), 319-322, 1998	128	1998
Epitaxial deposition of doped semiconductor materials M Bauer US Patent 7,863,163, 2011	121	2011
Strained n-Channel FinFETs Featuring In Situ Doped Silicon–Carbon Si1-yCy Source and Drain Stressors With High Carbon Content TY Liow, KM Tan, D Weeks, RTP Lee, M Zhu, KM Hoe, CH Tung, M Bauer, ... IEEE Transactions on Electron Devices 55 (9), 2475-2483, 2008	93*	2008
Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition M Bauer, KD Weeks, P Tomasini, N Cody US Patent 7,648,690, 2010	77	2010
Highly tensile strained silicon–carbon alloys epitaxially grown into recessed source drain areas of NMOS devices M Bauer, V Machkaoutsan, C Arena Semiconductor Science and Technology 22 (1), S183 - S187, 2006	72	2006
Relaxed SiGe buffers with thicknesses below 0.1 μm M Bauer, K Lyutovich, M Oehme, E Kasper, HJ Herzog, F Ernst Thin Solid Films 369 (1-2), 152-156, 2000	72	2000
Methods of making substitutionally carbon-doped crystalline Si-containing materials by chemical vapor deposition M Bauer, KD Weeks, P Tomasini, N Cody US Patent 7,438,760, 2008	69	2008
Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,402,504, 2008	68	2008
Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 8,530,340, 2013	64*	2013
Interplay of dislocation network and island arrangement in SiGe films grown on Si (001) C Teichert, C Hofer, K Lyutovich, M Bauer, E Kasper Thin Solid Films 380 (1-2), 25-28, 2000	59	2000
Quantitative secondary ion mass spectrometry analysis of SiO2 desorption during in situ heat cleaning E Kasper, M Bauer, M Oehme Thin Solid Films 321 (1-2), 148-152, 1998	58	1998
Epitaxial semiconductor deposition methods and structures PD Brabant, JP Italiano, CJ Arena, P Tomasini, I Raaijmakers, M Bauer US Patent 7,238,595, 2007	57	2007

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