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Adrie Mackus
Adrie Mackus
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Title
Cited by
Cited by
Year
The use of atomic layer deposition in advanced nanopatterning
AJM Mackus, AA Bol, WMM Kessels
Nanoscale 6 (19), 10941-10960, 2014
3942014
From the bottom-up: toward area-selective atomic layer deposition with high selectivity
AJM Mackus, MJM Merkx, WMM Kessels
Chemistry of Materials 31 (1), 2-12, 2018
3272018
Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review
AJM Mackus, JR Schneider, C MacIsaac, JG Baker, SF Bent
Chemistry of Materials 31 (4), 1142-1183, 2018
2182018
Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ...
ACS nano 11 (9), 9303-9311, 2017
1832017
Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition
MJ Weber, AJM Mackus, MA Verheijen, C van der Marel, WMM Kessels
Chemistry of Materials 24 (15), 2973-2977, 2012
1792012
Remote plasma ALD of platinum and platinum oxide films
HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ...
Electrochemical and Solid-State Letters 12 (7), G34, 2009
1582009
Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy
WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ...
Applied Physics Letters 95 (1), 2009
1522009
Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis
AJM Mackus, MA Verheijen, N Leick, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1905-1911, 2013
1462013
Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum
AJM Mackus, N Leick, L Baker, WMM Kessels
Chemistry of Materials 24 (10), 1752-1761, 2012
1412012
Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma
L Baker, AS Cavanagh, D Seghete, SM George, AJM Mackus, ...
Journal of Applied Physics 109 (8), 2011
1272011
Synthesis and in situ characterization of low-resistivity TaNx films by remote plasma atomic layer deposition
E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ...
Journal of Applied Physics 102 (8), 2007
1002007
Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition
AJM Mackus, JJL Mulders, MCM Van De Sanden, WMM Kessels
Journal of Applied Physics 107 (11), 2010
972010
Room-temperature atomic layer deposition of platinum
AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels
Chemistry of Materials 25 (9), 1769-1774, 2013
872013
Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes
AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ...
Journal of Vacuum Science & Technology A 28 (1), 77-87, 2010
862010
Nanopatterning by direct-write atomic layer deposition
AJM Mackus, SAF Dielissen, JJL Mulders, WMM Kessels
Nanoscale 4 (15), 4477-4480, 2012
822012
Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas
MJ Weber, AJM Mackus, MA Verheijen, V Longo, AA Bol, WMM Kessels
The Journal of Physical Chemistry C 118 (16), 8702-8711, 2014
792014
Area-selective atomic layer deposition of ZnO by area activation using electron beam-induced deposition
A Mameli, B Karasulu, MA Verheijen, B Barcones, B Macco, AJM Mackus, ...
Chemistry of Materials 31 (4), 1250-1257, 2019
782019
Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation
A Mameli, Y Kuang, M Aghaee, CK Ande, B Karasulu, M Creatore, ...
Chemistry of Materials 29 (3), 921-925, 2017
782017
Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements
AJM Mackus, NFW Thissen, JJL Mulders, PHF Trompenaars, ...
The Journal of Physical Chemistry C 117 (20), 10788-10798, 2013
702013
The vibrations of circular plates and their relation to Bessel functions
JR Airey
Proceedings of the Physical Society of London 23 (1), 225, 1910
701910
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