Sumit Agarwal
Title
Cited by
Cited by
Year
Mechanism of hydrogen-induced crystallization of amorphous silicon
S Sriraman, S Agarwal, ES Aydil, D Maroudas
Nature 418 (6893), 62-65, 2002
4402002
Well ordered polymer melts from blends of disordered triblock copolymer surfactants and functional homopolymers
VR Tirumala, A Romang, S Agarwal, EK Lin, JJ Watkins
Advanced Materials 20 (9), 1603-1608, 2008
862008
Surface reaction mechanisms during ozone and oxygen plasma assisted atomic layer deposition of aluminum oxide
VR Rai, V Vandalon, S Agarwal
Langmuir 26 (17), 13732-13735, 2010
832010
Absolute densities of N and excited in a plasma
S Agarwal, B Hoex, MCM Van de Sanden, D Maroudas, ES Aydil
Applied physics letters 83 (24), 4918-4920, 2003
782003
Surface reaction mechanisms during plasma-assisted atomic layer deposition of titanium dioxide
VR Rai, S Agarwal
The Journal of Physical Chemistry C 113 (30), 12962-12965, 2009
682009
Measurement of absolute radical densities in a plasma using modulated-beam line-of-sight threshold ionization mass spectrometry
S Agarwal, GWW Quax, MCM Van de Sanden, D Maroudas, ES Aydil
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 22 (1 …, 2004
672004
Surface reaction mechanisms during ozone-based atomic layer deposition of titanium dioxide
VR Rai, S Agarwal
The Journal of Physical Chemistry C 112 (26), 9552-9554, 2008
652008
Mesoporous silica films with long-range order prepared from strongly segregated block copolymer/homopolymer blend templates
VR Tirumala, RA Pai, S Agarwal, JJ Testa, G Bhatnagar, AH Romang, ...
Chemistry of Materials 19 (24), 5868-5874, 2007
602007
Tin-catalyzed plasma-assisted growth of silicon nanowires
SJ Rathi, BN Jariwala, JD Beach, P Stradins, PC Taylor, X Weng, Y Ke, ...
The Journal of Physical Chemistry C 115 (10), 3833-3839, 2011
592011
Low-Temperature Conformal Atomic Layer Deposition of SiNx Films Using Si2Cl6 and NH3 Plasma
RA Ovanesyan, DM Hausmann, S Agarwal
ACS Applied Materials & Interfaces 7 (20), 10806-10813, 2015
562015
In situ gas-phase hydrosilylation of plasma-synthesized silicon nanocrystals
BN Jariwala, OS Dewey, P Stradins, CV Ciobanu, S Agarwal
ACS applied materials & interfaces 3 (8), 3033-3041, 2011
552011
Threshold ionization mass spectrometry of reactive species in remote expanding thermal plasma
J Benedikt, S Agarwal, D Eijkman, W Vandamme, M Creatore, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23 (5 …, 2005
512005
Influence of surface temperature on the mechanism of atomic layer deposition of aluminum oxide using an oxygen plasma and ozone
VR Rai, V Vandalon, S Agarwal
Langmuir 28 (1), 350-357, 2012
502012
Abstraction of atomic hydrogen by atomic deuterium from an amorphous hydrogenated silicon surface
S Agarwal, A Takano, MCM Van De Sanden, D Maroudas, ES Aydil
The Journal of chemical physics 117 (23), 10805-10816, 2002
472002
Surface hydride composition of plasma-synthesized Si nanoparticles
BN Jariwala, NJ Kramer, MC Petcu, DC Bobela, MCM Sanden, P Stradins, ...
The Journal of Physical Chemistry C 115 (42), 20375-20379, 2011
422011
Atomic hydrogen interactions with amorphous carbon thin films
BN Jariwala, CV Ciobanu, S Agarwal
Journal of Applied Physics 106 (7), 073305, 2009
402009
Threshold ionization mass spectrometry study of hydrogenated amorphous carbon films growth precursors
J Benedikt, DJ Eijkman, W Vandamme, S Agarwal, MCM Van de Sanden
Chemical physics letters 402 (1-3), 37-42, 2005
382005
Mechanism of self-catalytic atomic layer deposition of silicon dioxide using 3-aminopropyl triethoxysilane, water, and ozone
VR Rai, S Agarwal
Chemistry of Materials 23 (9), 2312-2316, 2011
372011
Self-limiting growth of tantalum oxide thin films by pulsed plasma-enhanced chemical vapor deposition
M Seman, JJ Robbins, S Agarwal, CA Wolden
Applied physics letters 90 (13), 131504, 2007
362007
Atomic layer deposition of titanium dioxide using titanium tetrachloride and titanium tetraisopropoxide as precursors
RP Chaukulkar, S Agarwal
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 31 (3 …, 2013
322013
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Articles 1–20